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lab-grown diamond machine MPCVD equipment Diamond professional growth equipment CVD diamond growing machine manufacturer

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lab-grown diamond machine MPCVD equipment Diamond professional growth equipment CVD diamond growing machine manufacturer

Brand Name : BAXIT

Model Number : BXT-MPCVD

Certification : CE

MOQ : 1(Min. Order)

Price : USD149080- 150000Set|1 Set/Sets(Min. Order)

Payment Terms : L/C, T/T, D/A, D/P

Supply Ability : 5

Delivery Time : 5-8work days

Place of Origin : China

Operating frequency : 2450MHz

Output power : 0.1 ~ 6 kW continuously adjustable

Power stability : better than ±1% (@ rated status)

Output waveguide interface : BJ-26/22 with FD-26/22 standard flange

Power input : 380VAC/50Hz, 3-phase 5-wire, 11kW

Cooling water flow : 18L/min

System standing wave coefficient : VSWR ≤ 1.5

Microwave leakage : meet the national standards

Size and working mode : Φ200 x 300 (H) TM mode

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lab-grown diamond machine MPCVD equipment Diamond professional growth equipment CVD diamond growing machine manufacturerlab-grown diamond machine MPCVD equipment Diamond professional growth equipment CVD diamond growing machine manufacturer

Microwave generator and system Operating frequency 2450MHz
Output power 0.1 ~ 6 kW continuously adjustable
Power stability better than ±1% (@ rated status)
Output waveguide interface BJ-26/22 with FD-26/22 standard flange
Power input 380VAC/50Hz, 3-phase 5-wire, 11kW
Cooling water flow 18L/min
System standing wave coefficient VSWR ≤ 1.5
Microwave leakage meet the national standards
Microwave vacuum discharge chamber Size and working mode Φ200 x 300 (H) TM mode
Effective deposition area Φ50mm
Pressure control range 0.5KPa~30KPa
Pressure control accuracy ±15Pa
Vacuum acquisition Single crystal growth growth rate of 10-15μm/H, single growth thickness ≥ 1.6mm
Single crystal quality almost no defects under naked eye
Vacuum system Blowout mode fill with N2
Ultimate vacuum degree better than8×10-4Pa
Vacuum leakage rate ≤10-9pA.m3/s
Pressure rise 24 hours average pressure rise is less than1Pa/H
Gas mass flow system Accuracy 2%-100%F.S.,inletpressureis0.2-0.3Mpa
Gas type and range H2(1SLM),CH4(100SCCM),O2(10SCCM),N2(20SCCM)
Sample stage system Sample stage diameter Φ60mm,water-cooled;
Adjustment range of sample
table		 0~15mm
Cavity plate adjustment range 0~60mm
Substrate temperature measurement infrared temperature measurement
range		 600~1200℃(Infrared temperature measurement)
Temperature control precision temperature control precision±5℃;
Control range of constant temperature area temperature difference of each point of molybdenum platform≤30℃
Device interface Inlet and outlet water G1"outer wire
Gas connection 1/4"VCR outer wire
Exhaust discharge interface 3/4"outer wire
Power line TB4506
Insulation resistance ≥5MΩ
Reliability the continuous and stable working time under normal conditions shall not be less than 24H
Total power supply 380VAC±5%/50Hz,3phase5wire,13kW
Total cooling water 34L/min,clean soft water,inlet water temperature is 20℃±5℃;Water pressure is 0.2~0.4MPa
Dimensions ~1.95(L)x0.8(W)x1.90(H)m

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lab-grown diamond machine MPCVD equipment Diamond professional growth equipment CVD diamond growing machine manufacturerlab-grown diamond machine MPCVD equipment Diamond professional growth equipment CVD diamond growing machine manufacturer


Product Tags:

MPCVD Diamond Growing Machine

      

Professional Growth Diamond Growing Machine

      

CVD Diamond Growing Machine

      
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